【摘 要】
：
Recently, more and more high power laser have been used in the vacuum environment.The effect of vacuum contamination on the thin film laser damage has gradually become the focus in high power lasers f
【机 构】
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Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology of Tongji Univ
【出 处】
：
2016’中国溶胶-凝胶学术研讨会暨国际论坛
论文部分内容阅读
Recently, more and more high power laser have been used in the vacuum environment.The effect of vacuum contamination on the thin film laser damage has gradually become the focus in high power lasers fields.In this paper, the improvement of the contamination resistant of sol-gel SiO2 optical films in vacuum environment was studied.The surface of SiO2 thin film prepared by sol-gel method was modified by FDTS (1H,1H, 2H, 2H-perfluorodecyltrichlorosilane) and HMDS (Hexamethyl Disilazane) by in the vapor deposition device based on independent design.The transmittance of SiO2 film was improved and slightly higher (450nm,95.77%) than that of the unmodified (450nm, 95.09%) after HMDS modification.The peak transmittance of the films without heat treatment is about 95.77% (about 610nm).The peak transmittance of the films decreased to 94.34% (about 610nm) after heat treatment of 200 ℃.The peak transmittance of the films with heat treatment of 200 ℃ was increased to about 94.52% (617nm) after FDTS modification.And the peak transmittance shift to long wave direction.Meanwhile, surface contact angle of water droplets on the film increases from 35° to 107°after surface modification.
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