论文部分内容阅读
Effect of Oxygen Content on Microstructures and Optical Properties of Al2O3 Films Deposited by Oxyge
【机 构】
：
Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, Lanzhou 7300
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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