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Since the control of inclusion particles in steel on different stages of steelmaking process is very important for the production of clean steel with high level of final properties,various instrumental methods were developed for rapid evaluation of inclusion particles.In this study,the Laser Ablation-Inductively Coupled Plasma- Mass Spectrometry ( LA-ICP-MS) was applied for the rapid analysis of composition,number and size of oxide non-metallic inclusion particles and clusters in steels.Some advantages and limitations of this technique are examined and discussed.The lower size limit of oxide inclusion for LA-ICP-MS investigation was estimated based on the difference of ion intensity peaks between the inclusion particle and matrix steel.Based on the overlapping of ion intensity peaks of adjacent plural inclusion particles by LA-ICP-MS analysis,the maximum critical number of inclusion particles per unit volume in steel samples was also estimated.Though this analytical technique has some limits regarding to the content of soluble elements,the number and distribution of analyzed inclusions in metal matrix,it was found that the LA-ICP-MS can be successfully applied for the rapid analysis of oxide inclusion particles in steels.