3-DoF Dual-Mass Nickel MEMS Gyroscope utilizing Chevron Based Thermal Actuation

来源 :中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th | 被引量 : 0次 | 上传用户:xdool
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  This paper presents a theory and design of novel MEMS based thermally actuated 3DoF dual-mass Nickel gyroscope utilizing chevron actuators to drive proof mass.Thermophysical properties of electroplated nickel taken from commercially available low cost standard MEMS process MetaiMUMPs are incorporated while modeling and simulations of proposed model.Simulations indicate drive amplitude of 5.38μm at 0.1Vdc and 5.5μm at 0.5Vac making chevron an efficient actuator for gyroscopes instead of traditional electrostatic actuators.Mechanical amplification of the sensing mass drive-mode amplitude is achieved by using active-passive mass configuration along with a wide bandwidth of 2.19 kHz to enhance the robustness against structural parameters variations.
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