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5. Microstructure and Tribological Properties of SiCN Based Coatings Deposited by Magnetron Sputtering

Microstructure and Tribological Properties of SiCN Based Coatings Deposited by Magnetron Sputtering

来源 :The 17th International Conference on Surface Modification of | 被引量 : 0次 | 上传用户：huanan_0909

【作 者】

：

Qiang LI Yongxiang LENG Ronghua Wei Nan Huang 

【机 构】

：

Key Laboratory of Advanced Technologies of Materials, Ministry of Education, Southwest Jiaotong Univ

【出 处】

：

The 17th International Conference on Surface Modification of

【发表日期】

：

2011年3期

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