论文部分内容阅读
Effects of the Plasma Oxygen Concentration on the Properties of SiOx Films by MPECVD at Roll-to-roll
【机 构】
：
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 1026
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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