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Ion implantation has been received considerable attention due to the controlling of remarkable recognition properties [1].In this work,adsorption based quartz crystal microbalance (QCM) array sensors coated with different sensing elements are fabricated to effectively and simultaneously analyze gas mixtures for extremely low concentration levels (Figure 1) [2].For this purpose,ion implant technique is used to enhance the selectivity of specific toxic species such as NH3,NO2 and SO2.We selected various functional polymers such as polyvinyl alcohol (PVA),polypyrrole (PPy),and Poly(3,4-ethylenedioxythiophene) (PEDOT) and they were particularly modified by implanting nitrogen ion at 50 and 100 KeV using an ion-beam (ion implanter 300 KeV,KAERI).The implanted polymer films were coated onto quartz piezoelectric surfaces using spinning and the loading masses were about 4000~5000 ng.The selective behaviors of the surface modified polymers for gases are systematically analyzed and evaluated by using multicomponent adsorption equilibrium isotherm models such as extended Langmuir,loading ratio correlation (LRC),and ideal adsorbed solution theory (IAST) [3].