Research on high-precision phase extraction algorithm of grating projection contour measurement

来源 :2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议 | 被引量 : 0次 | 上传用户:shekitito
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  In phase measurement systems that useing phase-shifting techniques,the inconsistent background components between the phase shift fringe patterns and the nonsinusoidal waveforms of the fringe pattern,will directly affect the primary phase value of the extraction accuracy,then will influence the precision of system measurement.Therefore,I have proposed a high precision algorithm of phase extraction.The algorithm uses a bi-dimensional empirical mode decomposition(BEMD)removing the background component of phase shift fringe pattern,and then eliminating errors that are due to the effects of nonsinusoidal of the signal by suppressing the harmonic components to improve the accuracy of the extraction phase of the primary values.The experimental results show that the proposed method can effectively eliminate the impact of the background of fringe pattern and nonsinusoidal of fringe pattern,which is contributed to improve the precision of the measurement system.When the measurement system in an unstable environment light source,the experimental effect is more obvious.
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