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本研究主要利用化學浴沉積法成長氧化鋅奈米柱，藉由有系統的調整製程參數，歸納出各成長環境下所成長之奈米柱表面形貌，以製備出方向性一致且口徑小於100nm之氧化鋅奈米柱，並分析其紫外光波段之發光特性，探討各成長參數對於發光特性之影響。
以化學浴沉積法成長穩定形貌結構之氧化鋅奈米柱及其發光特性之研究
【摘 要】
：
本研究主要利用化學浴沉積法成長氧化鋅奈米柱，藉由有系統的調整製程參數，歸納出各成長環境下所成長之奈米柱表面形貌，以製備出方向性一致且口徑小於100nm之氧化鋅奈米柱，並
【机 构】
：
電子所,中原大學,桃園縣,Taiwan
【出 处】
：
2015台湾物理年会
【发表日期】
：
2015年期
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