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In this paper,a 3D finite element model is established to simulate the ultrasonic shot peening process by using a finite element software ABAQUS.The residual stress distribution of the AISI 304 stainless steel induced by ultrasonic shot peening (USP) is predicted by finite element analysis.The principle of USP is based on the vibration of shot using high power ultrasound.For high frequency of the system,the surface of the specimen is peened with a high number of impacts in a short period of time,which leads to repeated plastic deformation.Up to the present,material failure starts in the surface of structures in most cases and high tensile residual stress is one important factor contributing to stress corrosion cracking (SCC).