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The rotor is the critical component for the MEMS-based super micro engine.Stable operation with high rotational speed (＞ 1 million rpm) of rotor is guarantee to generate the designed power, In order to reduce the friction effect, the rotor is driven by a turbine and supported by hydrostatic journal and thrust air bearings.How to monitor and control the behavior of the rotor or the air bearing is the critical way to understand and improve the performance of the micro engine.