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  5. Investigation of a shear-type inertial piezoelectric actuator

Investigation of a shear-type inertial piezoelectric actuator

来源 :The 5th International Conference on Dynamics, Vibration and | 被引量 : 0次 | 上传用户：iyt1713
【摘 要】
：
　　Technology of micro-nano precision drive has always played an important role in the fields of micro-nano processing,precision optics,aerospace,biomedicine e
【作 者】
：
Ying Wu He Huang 
【机 构】
：
StateKeyLaboratoryforStrengthandVibrationofMechanicalStructures,ShaanxiEngineeringLaboratoryforVibra
【出 处】
：
The 5th International Conference on Dynamics, Vibration and
【发表日期】
：
2018年7期
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论文部分内容阅读
　　Technology of micro-nano precision drive has always played an important role in the fields of micro-nano processing,precision optics,aerospace,biomedicine et al.Compared with the traditional drive technology,the micro-nano precision drive has advantages of small size and high precision.
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