Vibrational Spectroscopic Imaging with Nanometer Spatial Resolution Achieved by Tip Enhancement

• 作 者: WanxinSun;
• 机 构: Bruker Nano Surface,11 Biopolis Way ＃10-10,The Helios,Singapore 138667
• 出 处: 中国化学会第29届学术年会
• 发表日期: 2014年期

　　Vibrational spectroscopies have been extensively used in characterizing chemical and structural information of materials,strain/stress analysis in nano devices,nano contamination identification in failure analysis.However the spatial resolution of these techniques is limited by the optical diffraction limit,i.e.micrometer in Raman and tens of micrometers in Infra-Red.In addition,the limited sensitivity has also plagued their applications.For example,the weak signal from nanometer size contamination is always buried in strong background.With aim to improve spatial resolution as well as sensitivity,we developed tip enhanced Raman imaging and tip enhanced IR imaging systems.In this article,we will report the developments of enabling technologies,including fundamental AFM techniques,reliable probes for tip enhanced Raman,signal detection scheme in IR.Some application examples in polymers,graphene,and semiconductor devices will be also discussed,where optical,electronic,and mechanical properties are obtained simultaneously.