Development of piezoelectric actuators for adaptive X-ray optics

• 作 者: ZHANG Dou Sanmartin D R Button T Atkins C Doel P Feldman C Willingale R Michette A Pfauntsch S James A Dunare C Parkes W Stevenson T Smith A
• 机 构: StateKeyLaboratoryofPowderMetallurgy,CentralSouthUniversity,Changsha410083,ChinaSchoolofMetallurgyan
• 出 处: 第十一届全国光学前沿问题讨论会
• 发表日期: 2015年10期

Piezoelectric actuators are widely employed in adaptive optics to enable an actively controlled mirror surface and improve the optical resolution and sensitivity.A viscous plastic processing technique was developed for the fabrication of lead zirconate titanate (PZT) actuators,i.e., unimorph, bimorph and piezoelectric fiber composites (PFC).