Optimization of the Tribological Performance of Diamond-Like Carbon Coatings Using Sputtering Proces

来源 :The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会) | 被引量 : 0次 | 上传用户：assembly2010

【摘要】

：

　　An intelligent approach,using adaptive network-based fuzzy inference systems(ANFIS),based on experimental designs,is used to characterize the tribological b

【作者】

：

Ming-DerJean;Guang-ShunWang;

【机构】

：

Department of Mechanical Engineering,Yung Ta Institute of Technology &Commerce,Ping-Tung,Taiwan

【出处】

：

The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)

【发表日期】

：

2014年期

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　　An intelligent approach,using adaptive network-based fuzzy inference systems(ANFIS),based on experimental designs,is used to characterize the tribological behavior of undoped and Zr doped diamondlike carbon(DLC)films,deposited using magnetron sputtering.An orthogonal array experiment is used and the effect of deposition parameters on the films is systematically determined.

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Optimization of the Tribological Performance of Diamond-Like Carbon Coatings Using Sputtering Proces

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