A Novel Approach for Fabrication of Pneumatic Microvalves on PMMA Chips by Using Fluorinated Ethylen

• 作 者: Hengwu Chen Shanshi Huang Jiang Huang Qiaohong He
• 机 构: ZhejiangUniversity,ChinaZhejiangUniversity,China;GNBiosystemsInc.,USA
• 出 处: 2012年全国微纳尺度生物分离分析学术会议、第七届全国微全分析系统学术会议暨第三届国际微流控分析(西湖)学术论坛
• 发表日期: 2012年4期
• 关键词: polymer chip pneumatic valve fluorinated ethylene propylene membrane

Pneumatic microvalves involving PDMS elastic membranes [1] have been widely used in many lab-on-chip devices.However,PDMS is highly gas-permeating,less compatible to chemicals and highly absorptive.Fluorinated ethylene propylene (FEP) is chemically-inert,non-adsorptive and air-tight,which is desired for a material to be used for microfluidic chips.