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In recent years portability and versatility have become more and more important,resulting in the demand for smaller,multifunctional,and more complex products.Tool manufacturing for mass-production of micro-components,such as in micro-injection requires often hard-to-machine workpiece materials machined very precisely in three-dimensional forms in the micron range.For the fabrication of complex three-dimensional moulds using very tough materials,micro-electro-discharge machining (micro-EDM) is one of the alternative machining processes that can be used successfully1.With Micro-EDM-Technology almost every conductive material,regardless of its hardness can be manufactured.