An Analysis of the Characteristics of Recovered High-purity Silicon Carbide Powder

来源 :The 12th International Symposium on East Asian Recycling Tec | 被引量 : 0次 | 上传用户：wujielele

【摘要】

：

　　Silicon slurry produced in the wafer cutting process contains about 1%metalfragments,14%silicon powder,30%silicon carbide abrasive,and 55%oil(DEG,PEG).Thecu

【作者】

：

Hui-yi Tsai Chun-yi Wu Wei-sheng Chen Tuu-en Chang Kuan-yu Shih

【机构】

：

ResourcesRecyclingandManagementResearchCenter,NationalChengKungUniversity,No-99-500,Sec.3,An-MingRd.

【出处】

：

The 12th International Symposium on East Asian Recycling Tec

【发表日期】

：

2013年11期

【关键词】

：

Silicon slurry Silicon carbide Recycling Particle diameter DIA

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　　Silicon slurry produced in the wafer cutting process contains about 1%metalfragments,14%silicon powder,30%silicon carbide abrasive,and 55%oil(DEG,PEG).Thecutting fluid costs over 65%of total wafer manufacturing expenses.

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An Analysis of the Characteristics of Recovered High-purity Silicon Carbide Powder

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