论文部分内容阅读
Piezoresistive MEMS pressure sensor always has better performance than other pressure sensors in harsh environment.In order to assess the piezoresistive MEMS pressure sensor performance fully at high and low temperature,the influence mechanism research of temperature on piezoresistive MEMS pressure sensor is carried out.Failure modes and failure mechanisms of piezoresistive MEMS pressure sensor at high and low temperature environments is analyzed,and the temperature stress distribution regular of piezoresistive MEMS pressure sensor in high and low temperature environments is identified from theoretical analysis.