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  5. Characterization of Thin ScAlN Film based Natural Single-Phase Unidirectional SAW Transducers using

Characterization of Thin ScAlN Film based Natural Single-Phase Unidirectional SAW Transducers using

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户：beiduwill
【摘 要】
：
Background, Motivation and Objective Natural single-phase unidirectional SAW transducers were reported previously for oriented quartz, LiNbO3, LiTaO3, La3Ga5SiO14 substrates, etc.The reason behind the
【作 者】
：
Abhay Kochhar Yasuo Yamamoto Akihiko Teshigahara Ken-ya Hashimoto Shuji Tanaka Masayoshi Esashi 
【机 构】
：
Tohoku University, Japan DENSO CORPORATION, Japan
【出 处】
：
2015两岸超声技术与医学研讨会
【发表日期】
：
2015年5期
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Background, Motivation and Objective Natural single-phase unidirectional SAW transducers were reported previously for oriented quartz, LiNbO3, LiTaO3, La3Ga5SiO14 substrates, etc.The reason behind the directionality is in the shift in the transduction and reflection coefficient.These substrates observed 15-20 dB of directivity.However, the directionality in the thin piezoelectric films hasnt been reported elsewhere till recently by our group.The motivation to utilize the directionality in thin piezoelectric films was to improve the transducers return loss effectively such that it can be utilized in integrated sensor applications.For characterization of directionality, in this paper we utilized Sagnac interferometer.More rigorous study and characterization with the different wave propagation direction and films c-axis tilt is in progress.
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