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  5. Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas

Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：qnmdmn
【摘 要】
：
We present the very first experimental evidence of the so-called collisionless electron bounce-resonance-heating (BRH) in low pressure dual-frequency (DF) capacitively coupled plasmas (CCPs).
【作 者】
：
Yong-Xin Liu Quan-Zhi Zhang Lu-Jing Hou Wei Jiang Xiang-Zhan Jiang 
【机 构】
：
School of Physics and Optoelectronic Technology,Dalian University of Technology, 116024 Dalian, Chin
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Dual-frequency Capacitively Coupled Plasma Collisionless Bounce Resonance heatin 
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We present the very first experimental evidence of the so-called collisionless electron bounce-resonance-heating (BRH) in low pressure dual-frequency (DF) capacitively coupled plasmas (CCPs).
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