【摘 要】
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The subject of this paper is to introduce the research on nano dimensional metrology using the atomic force microscopy (AFM) technique at the PTB — the national metrology institute of Germany.Calibrat
【机 构】
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Physikalisch-Technische Bundesanstalt (PTB),Bundesallee 100,D-38116 Braunschweig,Germany
【出 处】
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International Conference on Nanoscience & Technology,China 2
论文部分内容阅读
The subject of this paper is to introduce the research on nano dimensional metrology using the atomic force microscopy (AFM) technique at the PTB — the national metrology institute of Germany.Calibration of the imaging magnification and distortion of all kinds of microscopes is a fundamental task, and is usually realised by applying a set of step height, lateral or 3D standards.To calibrate such standards, PTB has built up several metrological AFMs, which feature miniature interferometers for three-dimensional position measurements and thus realising direct measurement traceability.The paper will highlight a large range metrological AFM, which has a capable measurement volume of 25 mm x 25 mm x 5 mm (x, y, z).Versatile calibration examples of, for instance, step height, layer thickness, 1D/2D gratings, surface roughness and the form ofnano structures will be demonstrated.
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