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5. Fabrication of SHF range SAW devices on AlNDiamond-substrate

Fabrication of SHF range SAW devices on AlNDiamond-substrate

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：Evilkonata

【作 者】

：

Tatsuya Omori Atsushi Kobayashi Yuya Takagi Ken-ya Hashimoto Masatsune Yamaguchi 

【机 构】

：

ChibaUniversity,GraduateSchoolofEngineering,Chiba,Japan

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年11期

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