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With the dramatic increase in sensor R&D and applications over past years,tremendous advances have been made in sensor technology.Sensors not only can be used to monitor the health of persons but also the safety of bridges,coalmine,high buildings and so on.Safety and health is not the only driving force; the ability to replace time-based maintenance with condition-based maintenance could also save money and minimize time consumption.For many applications,size is not a critical matter.However,size reduction often goes together with cost reduction in production,increased sensitivity,and reduced energy consumption.Therefore,for many applications,and especially energy efficient wireless sensors in remote places,M/NEMS seems to become the technology of choice.This slide introduces the R&D of MicroNano sensors for safety and health in MicroNano System Research Center.