【摘 要】
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Background, Motivation and Objective Acoustic lens for capacitive micromachined ultrasonic transducers (cMUT) is responsible for not only elevation focusing but also insulation from a high DC bias vol
【机 构】
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Interdisciplinary Program of Integrated Biotechnology, Sogang University, Seoul, Korea, Republic of;
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Background, Motivation and Objective Acoustic lens for capacitive micromachined ultrasonic transducers (cMUT) is responsible for not only elevation focusing but also insulation from a high DC bias voltage. Since ultrasound signals are transmitted and received through acoustic lens, its acoustic characteristics are crucial to achieve the full performance of a cMUT. The acoustic characteristics of lens materials such as attenuation coefficient and viscosity affect signal strength, center frequency, and bandwidth. Although polydimethylsiloxane (PDMS) and room temperature vulcanization (RTV) silicone have been used as an acoustic lens for cMUTs, no performance comparison between those materials has been conducted. The objective of this study is to seek an optimal acoustic lens material for cMUTs through finite element method using PZFlex software; the candidate materials are PDMS, RTV, and urethane generally used for piezoelectric transducers.
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