Structure and micro-mechanical properties in helium-implanted layer on Ti by plasma-based ion implan

• 作 者: XinxinMa;JinlongLi;MingrenSun;
• 机 构: School of Materials Science and Engineering,Harbin Institute of Technology,150001.Harbin.China
• 出 处: Fifth International Conference on Surface Engineering(第五届表面工
• 发表日期: 2007年期

　　The present paper concentrates on structure and micro-mechanical properties in the helium-implanted layer on titanium treated by plasma-based ion implantation with a voltage of-30 kV and a dose range of 3,6,9 and 12×1017 ions/cm2.The implanted temperature was measured by an infrared thermometer and it was maintained at approximately 350 ℃.X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) were used to characterize composition distribution,element chemical state and structure in the implanted layers.The variations of hardness with indenting depth were measured by nano-indentation.Helium ion implantation into titanium leads to the formation of bubbles with a diameter from a few nanometers to a few tens nanometer,and makes Ti present as amorphous in the implanted layer.When increasing implanted dose,the size of the helium bubble increases.