【摘 要】
：
Since the invention of the scanning tunneling microscope (STM) and the scanning force microscope (SFM), many STM-and SFM-based techniques have been developed for atomic imaging and manipulation.These
【机 构】
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MEMS & Nanotechnology Lab.(National Lab.)
【出 处】
：
第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛
论文部分内容阅读
Since the invention of the scanning tunneling microscope (STM) and the scanning force microscope (SFM), many STM-and SFM-based techniques have been developed for atomic imaging and manipulation.These new techniques have opened up entirely new possibilities for studying the structure and dynamics of individual molecules and atoms in surface science, biophysics, and the semiconductor industry.In spite of striking achievements, these probe-based techniques have the disadvantage that they do not have the capability of chemical analysis of solid surfaces.
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