Effects of RF power on the low-pressure RF inductively coupled hydrogen-trans two butane plasma

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：aswe19

【摘要】

：

　　Hydrocarbon(CH)shells deposited by plasma enhanced vapor deposition(PECVD)are often used as tritium fuel container and ablator materials for inertial confin

【作者】

：

GuoChen;ZhibingHe;XiaoshanHe;LingZhang;YongjianTang;

【机构】

：

Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,China

【出处】

：

The 6th International Conference on Nanoscience and Technolo

【发表日期】

：

2015年期

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论文部分内容阅读

　　Hydrocarbon(CH)shells deposited by plasma enhanced vapor deposition(PECVD)are often used as tritium fuel container and ablator materials for inertial confinement fusion(ICF)studies [1,2,3].In order to achieve ICF,it is necessary to understand the growth mechanism of the CH film.

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Effects of RF power on the low-pressure RF inductively coupled hydrogen-trans two butane plasma

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