论文部分内容阅读
In this paper,a new design and fabrication method of single crystal cantilever resonator was proposed.The electrothermal excitation/piezoresistive detection resonator was designed for the measurement of the polymer-coated cantilevers resonant trequency shift due to the mass change caused by specific chemical reaction or physical absorption of gas molecules.The cantilever resonator based gas sensor can achieve high selectivity and sensitivity.The model of the resonator is shown in Figure 1.The simulation and optimization of the bending,stress,and temperature distribution of the cantilever were carried out with finite element analysis (FEA).Figure 2 shows von Mises stress distribution of the cantilever accomplished by Ansys 10.0.Figure 3 shows the harmonic response of the cantilever under 5V driving voltage.