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At room temperature,non-thermal RF plasma treatments,such as O2 plasma,Ar plasma,etc.,are well known techniques to clean surfaces by removing impurities.The technique is also known to modify and promote novel supported metal catalysts.Materials with unique and promising catalytic properties have been reported and reviewed.There are two situations where applying plasma treatment in catalyst preparation are advantageous (i) to modify the interaction between metal and support such that particle size and metal-support interaction can be controlled,(ii) to remove encapsulation agents on the metallic nanoparticle such that new methods based on colloidal preparation of metal nanoparticles can be employed.This paper reports recent progress of investigations on supported metal catalysts,such as Ni,Pd and Au catalysts,using non-thermal RF plasma techniques.