【摘 要】
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This paper presented a novel planar electromagnet consisting of a planar copper coil and a magnetic yoke. CoFeB was proposed as magnetic yoke materials, instead of the traditional permanent magnets. T
【机 构】
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Laboratory of Biosensing and MicroMechatronics, School of Materials Science and Engineering, Southwe
【出 处】
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第十一届全国表面工程大会暨第八届全国青年表面工程学术会议
论文部分内容阅读
This paper presented a novel planar electromagnet consisting of a planar copper coil and a magnetic yoke. CoFeB was proposed as magnetic yoke materials, instead of the traditional permanent magnets. The planar electromagnet was fabricated and optimized in such a way to maximize the electromagnetic force, especially varying CoFeB thickness and component. XRD, SEM and MPMS were used to characterize the performance of the electromagnet, which resulted in good performance with the thicker CoFeB magnetic yoke and high ratio of Co/Fe. Integration with other micro apparatus, the planar electromagnet will provide potential applications in biosensors, biological medicine, drug delivery, chemical analysis, environmental monitoring, etc.
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