Simulation of water-cooled shower head for the choice of Zinc and Oxygen precursors for ZnO MOCVD gr - 论文文献免费下载 - 皮皮文库

Simulation of water-cooled shower head for the choice of Zinc and Oxygen precursors for ZnO MOCVD gr

来源 :第六届国际氧化锌及相关材料研讨会 | 被引量 : 0次 | 上传用户：cqwsly

【作者】

：

Guangyao Zhu Shulin Gu Shunming Zhu Kun Tang Jiandong Ye Rong Zhang Youdou Zheng

【机构】

：

Nanjing National Laboratory of Microstructures and School of Electronics Science and Engineering,Nan

【出处】

：

第六届国际氧化锌及相关材料研讨会

【发表日期】

：

2010年4期

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