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Three-dimensional and electromagnetic Particle-in-Cell/ Monte Carlo (PIC/MC) simulations are performed to investigate the breakdown process in an air-filled microwave waveguide with the VORPAL of Tech-X Corporation.The waveguide,filled with 200Pa atmosphere.has rectangular cross-section of 1cm2,and the length is 2cm.The IOGHz microwave transmits to the waveguide from one end in TE1o mode.with the electric field magnitude of IMV/m,.The whole breakdown processes about 12ns are traced.The wave renection and waveguide cut-off,due to the generation of the plasma in the breakdown.has been observed.