【摘 要】
：
As semiconductor devices continue to shrink and become faster,new materials and processes be required to enable the continuation of this progress.Supercritical CO2 (SCCO2) based technology has been pr
【机 构】
：
Department of Chemical and Biomolecular Engineering,Sogang University,Shinsu-Dong,Mapo-Gu,Seoul,Kore
【出 处】
：
The 6th International Conference on Separation and Technolog
论文部分内容阅读
As semiconductor devices continue to shrink and become faster,new materials and processes be required to enable the continuation of this progress.Supercritical CO2 (SCCO2) based technology has been proposed for various steps in device fabrication,such as cleaning [1,2].Compared with conventional organic solvents CO2 is non-toxic,non-flammable,relatively inexpensive,and it has moderate critical constants (31.1 ℃ and,73.8 bar).Furthermore,SCCO2 has the solvating properties of a liquid and thus can dissolve chemicals,such as alcohols and amines,forming a homogenous supereritical fluid solution.SCCO2 is non-polar and has ability to solvate non-polar chemicals.However,it will not solvate many species,including inorganic salts and polar organic compounds that are usually necessary for efficient cleaning.Therefore co-solvents and/or chemical additives are added to the SCCO2 fluid to increase the solubility or enhance the dissociation of these species.We investigated the effect of surfactant concentration,and stripping temperature and pressure on the stripping efficiency.The wafer surfaces before and after stripping were analyzed by scanning electron microscopy and by an energy dispersive X-ray spectrometer.The HDIP could be stripped off completely in 30 rain with additive/SCCO2 mixture at 20MPa and 343 K.
其他文献
A novel combined technology was brought forward for purification of trans-anethol from star anise oil (mass fraction of trans-anethol was 81.03 wt%).The purifying process consisted of the removal of v
Ethyl trifluoroacetate (TFAE) is the ethyl ester of TFA.It is used as an important intermediate in the synthesis of pharmaceutical and agricultural chemicals.The chemical reactions usually involve nuc
The separation of aromatic compounds and aliphatic hydrocarbons is of pivotal importance because the aromatics often serve as major raw materials in plastic,synthetic rubber,and synthetic fiber manufa
The purpose of this study was to monitor a crystallization process by near-infrared (NIPR) spectroscopy involving α-form and γ-form of indomethacin (IMC).IMC has a complicated polymorphism consisting
Cu(Ⅰ)-containing room temperature ionic liquids (Cu-RTILs),prepared from CuCl and alkylmethylimidazolium alkylphosphites([RMIM][RHPO3]),were found to reversibly and selectively interact with propyne o
APIs polymorphic characteristics are crucial to their physicochemical behaviors such as solubility,dissolution rate,bioavailability,and stability.Acetaminophen,a representative NSAID drug,is known to
In this study,response surface methodology (RSM) [1] was used to combine with process simulation for complex optimization of operating parameters on a prefractionator distillation column in solvent fe
In this study,modeling and simulation works have been performed using mono-ethanol amine (MEA) aqueous solution to remove CO2 contained in the natural gas stream.Amine special thermodynamic package bu
Reactive distillation (RD),a combination of reaction and distillation in a single vessel,is receiving increasing attention because of its high potential for process intensification [1].RD can be effec
China is a big industrial energy consuming country.The largest proportion of energy consuming is the operations of separation in chemical industry,and the energy consumption of the distillation is the