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For more than a decade,researchers have been searching for means to improve the Curie temperature offerromagnetic GaMnAs samples,among which post-growth annealing in furnce has been treated as the mostimportant one.In this work,we demonstrate that the Curie temperature can be improved by electron irradiationfor the first time.Different doses of electron irradiation(1 × 1014,1 × 1015 and 1 × 1016 electrons/cm2)at 1.7 MeV were applied,the enhancement of magnetic and electrical properties of ferromagnetic GaMnAs filmswas experimentally confirmed by XRD,SQUID and Magneto-transport measurements.