一种新型的离子束溅射高通量组合材料制备系统

来源 :第195场中国工程科技论坛——中国科学仪器设备与试验技术发展高峰论坛、第四届中国能力验证与标准样品论坛暨2014国际冶金 | 被引量 : 0次 | 上传用户：heyunhu

【摘要】

：

高通量组合材料制备与表征技术是材料基因工程技术的重要组成部分,但相关仪器设备的缺乏制约了该技术的推广应用.本报告介绍一种自主开发的掩模镀膜法组合材料芯片制备技术及相应的高真空离子束溅射系统.该技术通过连续移动的掩模来精确控制叠层薄膜的厚度梯度,从而实现多元素组合和材料组分梯度,可以完整地覆盖三元材料相图的组分空间.

【作者】

：

刘静向勇谢梦项晓东汪洪

【机构】

：

中国建筑材料科学研究总院,中国电子科技大学,中国

【出处】

：

第195场中国工程科技论坛——中国科学仪器设备与试验技术发展高峰论坛、第四届中国能力验证与标准样品论坛暨2014国际冶金

【发表日期】

：

2014年5期

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一种新型的离子束溅射高通量组合材料制备系统

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