一种基于静电排斥力的大冲程MEMS变形镜设计与测试

来源 :2010(第三届)中国微纳电子技术交流与学术研讨会 | 被引量 : 0次 | 上传用户：xqdd520cn

【摘要】

：

本文给出了一种基于静电排斥力的大冲程MEMS变形镜的结构设计和制造方案，通过对器件的测试对比了三种不同电极空间分布方式的变形镜的静态位移量.近年来，自适应光学中的MEMS变形镜广泛应用于天文学以及生物成像等技术.MEMS变形镜常采用基于静电吸引力的平板电容驱动器来实现纵向位移，其结构简单，响应速度快，但存在静电塌陷问题[1]，很难实现较大的纵向冲程.

【作者】

：

陈科帆姚军高福华汪为民倪祖高

【机构】

：

中国科学院光电技术研究所微细加工与光学技术国家重点实验室,成都610209 四川大学物理学院

【出处】

：

2010(第三届)中国微纳电子技术交流与学术研讨会

【发表日期】

：

2010年4期

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一种基于静电排斥力的大冲程MEMS变形镜设计与测试

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