Piezoelectrically transduced Single-Crystal-Silicon Plate Resonators - 论文文献免费下载 - 皮皮文库

Piezoelectrically transduced Single-Crystal-Silicon Plate Resonators

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：tsmcxuesheng

【作者】

：

Antti Jaakkola Ari Alastalo Piia Rosenberg Olli Holmgren Kimmo Kokkonen James Dekker Arto Nurmela Tuomas Pensala Tommi Riekkinen Torni Mattila

【机构】

：

VTT technical research center of Finland, Espoo, Finland

【出处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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