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Thin and dense samarium doped ceria(SmxCe1-xO2-0.5X,SDC)with different doping radio(X=0,0.05,0.1,0.15,0.2,0.25)were synthesized by solid state sintering.The structure of samples were measured by XRD and SEM to qualify the dense structure.Raman Scattering was used to detect the distribution of oxygen vacancy.The pure CeO2 only has a Raman peak at 465cm-1.