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作为TFT材料，透明氧化物半导体受到广大研究者的瞩目。其中氧化锌薄膜晶体管是一个重要的研究对象。多晶或者非晶ZnO薄膜晶粒内的电子做共有化运动，但是由于晶界位垒和缺陷或杂质的散射作用，其迁移率远低于单晶ZnO薄膜的迁移率(～200 cm2/Vs)。
利用氢钝化技术研制高性能氧化锌晶体管
【摘 要】
：
作为TFT材料，透明氧化物半导体受到广大研究者的瞩目。其中氧化锌薄膜晶体管是一个重要的研究对象。多晶或者非晶ZnO薄膜晶粒内的电子做共有化运动，但是由于晶界位垒和缺陷或杂质的散射作用，其迁移率远低于单晶ZnO薄膜的迁移率(～200 cm2/Vs)。
【机 构】
：
武汉大学
【出 处】
：
第五届全国柔性与印刷电子研讨会(FPEChina)
【发表日期】
：
2015年3期
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