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【摘 要】
：
A precision SU8 micromachining technique has been developed for terahertz waveguide components.These circuits are formed by stacking several layers of silve
【机 构】
：
School of Electronic,Electrical and Computer Engineering The University of Birmingham,Edgbaston,Birm
【出 处】
：
The 7th UK/Europe-China Workshop on Millimeter Waves and Ter
【发表日期】
：
2014年期
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