High power impulse magnetron sputtering for generation of complex nanostructures and thin films - 论文文献免费下载 - 皮皮文库

High power impulse magnetron sputtering for generation of complex nanostructures and thin films

来源 :The 6th International Symposium on Plasma Nanosciences-Progr | 被引量 : 0次 | 上传用户：zengquaner

【作者】

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【机构】

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Department of Physics,Link(o)ping University SE-581 83 Link?ping,Sweden

【出处】

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The 6th International Symposium on Plasma Nanosciences-Progr

【发表日期】

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2015年3期

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