论文部分内容阅读
Optical and Microstructural Properties of ZnO/TiO2 Nanolaminates Prepared by Atomic Layer Deposition
【作 者】
:
【机 构】
:
State Key Laboratory of ASIC and System,Department of Microelectronics,Fudan University,Shanghai 200
【出 处】
:
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
:
2012年4期
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