Study on the Electric Field Testing Integration Microsystem for the Near Field Target Detection

来源 :中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th | 被引量 : 0次 | 上传用户:wspywps110
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  The Electric Field Testing Integration Microsystem (EFTIM) for the near field target detection is designed based on the theory of electrostatic field,and the near field target detection is applied for the security system.The theory of the capacitance is expounded and the different type of capacitance is analyzed in the paper.Compared with the inter-digitated electrode layout,the spiral one is chosen because of the better result.Considering the affect of the dielectric constant,the test is made when the material between the electrodes is in air and underwater.The E-field system voltage changes,when the targets near to it,which proves that it is feasible for the electric field testing system to be used for the t near field target detection in air and underwater.
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