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5. Fabrication of MEMS Diaphragm Transducer Array Based on Epitaxial PZT Thin Film for 2-D Hydrophone A

Fabrication of MEMS Diaphragm Transducer Array Based on Epitaxial PZT Thin Film for 2-D Hydrophone A

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：anywho

【作 者】

：

Nagya Okada Daisuke Akai Kazuaki Sawada Makoto Ishida Kazuki Higuchi Yoshiyuki Asakura Kazuto Kobayashi Mikinorri Ito Masashi Takabe Mikito Otonari Otonari Ikuo Kanja 

【机 构】

：

HONDA ELECTRONICS CO., LTD., Japan Toyohashi Univ

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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