论文部分内容阅读
Influence of the Magnetic Flux on Current-Voltage Characteristics in High Power Pulsed Magnetron Spu
【机 构】
:
State Key Lab of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin, 150
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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