Influence of low pressure Argon plasma on the deposition of Al2O3 film onto the PET surfaces by atom

• 作 者: EDY Riyanto XIAOJIANG Huang GUO Ying ZHANG Jing SHI Jianjun
• 机 构: College of Science,Donghua University,Shanghai 201620,P.R.China;State Key Laboratory for Modificatio
• 出 处: 第一届国际ALD应用大会暨第二届中国ALD学术交流会
• 发表日期: 2012年4期
• 关键词: Atomic layer deposition PET film Al2O3 coating

　　Here the surface modifications of polyethyleneterephthalate(PET)films are carried out by the atomic layer deposition(ALD)and plasma assisted atomic layer deposition(PA-ALD).