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以高精度干涉条纹小数测量、研合膜厚度的量化控制与量块内部温度测量为重点,对进行一等量块光波干涉测量的各要件进行了分析,并引用国际比对结果予以了验证。
The high precision interferometric fringes measurement, the research on the quantitative control of the film thickness and the internal temperature measurement of the measuring block are the key points. The components of the first-order light interference measurement are analyzed, and the results of international comparison are verified.