【摘 要】
：
本文采用溶胶-凝胶旋涂法在玻璃基底上制备镉掺杂氧化锌(Zn1-xCdxO)薄膜,研究镉掺入量(x=0,0.1,0.2,…1)和不同预处理温度对薄膜结构及其光学性能的影响.XRD结果表明,当150℃预处理时,当x＜0.3时Zn1-xCdxO薄膜以六角纤锌矿结构为主,呈现ZnO(100)、(002)、(101)特征峰；当x≥0.3时Zn1-xCdxO薄膜以立方晶相为主,CdO(111)、(200)出现
【机 构】
：
硅酸盐建筑材料国家重点实验室,武汉理工大学,武汉,430070
【出 处】
：
TFC`15全国薄膜技术学术研讨会
论文部分内容阅读
本文采用溶胶-凝胶旋涂法在玻璃基底上制备镉掺杂氧化锌(Zn1-xCdxO)薄膜,研究镉掺入量(x=0,0.1,0.2,…1)和不同预处理温度对薄膜结构及其光学性能的影响.XRD结果表明,当150℃预处理时,当x＜0.3时Zn1-xCdxO薄膜以六角纤锌矿结构为主,呈现ZnO(100)、(002)、(101)特征峰；当x≥0.3时Zn1-xCdxO薄膜以立方晶相为主,CdO(111)、(200)出现,且随着浓度提高衍射峰强逐渐增强.当预处理温度大于150℃,x＜0.3时,呈现氧化锌沿(002)晶面定向生长,衍射峰位向小角度偏移；x≥0.3时CdO岩盐矿结构衍射峰(111)(200)开始逐渐增强,峰位向大角度偏移.紫外可见透过光谱测试表明Zn1-xCdxO薄膜在可见光范围内透过率高于80％；随着x增大,薄膜透过率略有减小.随着x增大,Zn1-xCdxO薄膜的禁带宽度逐渐由3.3eV(x=0)减小至2.2eV(x=1).
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