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ＡＭＲＡＹ 1 0 0 0Ｂ扫描电镜透镜系统的工作参数已由厂家存储在编程ＲＯＭ中。透镜电流的变化由计算机控制 ,计算机接受面板操作指令。具体是 :面板操作→计算机响应→调数据→数据缓冲器→数模转换 (Ｄ Ａ)→激励功放与反馈→透镜线圈。下面对该系统的电路、故障检测方法与
Operating parameters of the AMRAY 1 0 0 0B SEM system are stored in the programming ROM by the manufacturer. The change of the lens current is controlled by the computer, and the computer accepts the panel operation instruction. Specifically: panel operation → computer response → tune data → data buffer → D / A → excitation amplifier and feedback → lens coil. The following circuit of the system, fault detection methods and